Transmission line comprising a signal conducting layer including a signal line covered by a shielding layer and having a slot over the signal line
AssigneeSkyworks Solutions, Inc.
InventorsBo Yu, Xuanyi Dong, Bo Pan
Life of this patent
Estimating the term…
Abstract
A transmission line can include a first conductive line, a second conductive line, a signal line disposed between the first conductive line and the second conductive line, with a first gap between the signal line and the first conductive line, and a second gap between the signal line and the second conductive line. A first shield can be disposed directly over a portion of the first gap, and a second shield can be disposed directly over a portion of the second gap. A slot can separate the first shield from the second shield. The transmission line can be a coplanar waveguide.
Claims21
A transmission line comprising:
- a dielectric layer that has a first side and a second side;
- a first conductive line disposed over the first side of the dielectric layer;
- a second conductive line disposed over the first side of the dielectric layer;
- a signal line disposed over the first side of the dielectric layer and between the first conductive line and the second conductive line, a first gap between the signal line and the first conductive line, and a second gap between the signal line and the second conductive line;
- a first shield disposed directly over a portion of the first gap, having a width greater than a width of the first conductive line, and spaced laterally away from the signal line by a first distance;
- a second shield disposed directly over a portion of the second gap, having a width greater than a width of the second conductive line, and spaced laterally away from the signal line by a second distance, with a slot separating the first shield from the second shield, a combined width of the first distance and the second distance being substantially greater than a width of the signal line;
- and
- a conductive layer disposed over a second side of the dielectric layer and electrically connected through the dielectric layer to the first conductive line and to the second conductive line.
A method of making a transmission line, the method comprising:
- providing a dielectric layer having a first side and a second side;
- forming a first conductive line over the first side of the dielectric layer;
- forming a second conductive line over the first side of the dielectric layer;
- forming a signal line over the first side of the dielectric layer and between the first conductive line and the second conductive line, with a first gap between the signal line and the first conductive line, and a second gap between the signal line and the second conductive line;
- forming a first shield disposed directly over a portion of the first gap, having a width greater than a width of the first conductive line, and spaced laterally away from the signal line by a first distance;
- forming a second shield disposed directly over a portion of the second gap, having a width greater than a width of the second conductive line, and spaced laterally away from the signal line by a second distance with a slot separating the first shield from the second shield, a combined width of the first distance and the second distance being substantially greater than a width of the signal line;
- forming a conductive layer over a second side of the dielectric layer;
- and
- electrically connecting the conductive layer to the first conductive line and to the second conductive line through the dielectric layer.
Dependencies are inferred from the claim text.