Analysis system

An analysis system comprising:

• (a) acquiring a first captured image of a sample viewed from a first direction by irradiating the sample including a multilayer structure with an electron beam from the first direction;
• (b) acquiring a second captured image of the sample viewed from a second direction by irradiating the sample with the electron beam from the second direction, in which the second direction intersects the first direction;
• and
• (c) acquiring depth information of the multilayer structure using information of the sample including the first captured image, the second captured image, a number of layers of the multilayer structure, a thickness of one layer or a thickness of each layer of the multilayer structure, and a depth at which a first layer of the multilayer structure starts;
• wherein the sample includes:
• an upper surface;
• a lower surface opposite to the upper surface;
• an observation surface formed on a part of the upper surface so as to be inclined from the upper surface toward the lower surface;
• and
• a section that is sectioned in the observation surface, and
• a part of the multilayer structure is exposed on the observation surface and the section,
• in the step (a), the upper surface is irradiated with the electron beam, and
• in the step (b), the section is irradiated with the electron beam;
• wherein the step (c) includes:
• (c1) specifying a first portion of the multilayer structure exposed on the observation surface in the first captured image as first reference coordinates (x1, y1) viewed from the first direction;
• (c2) specifying a second portion of the multilayer structure which is exposed on the observation surface in the second captured image and which corresponds to a coordinate x1 of the first reference coordinates (x1, y1) as second reference coordinates (x1, z1) viewed from the second direction;
• (c3) specifying a third portion of the multilayer structure exposed on the observation surface and different from the first portion in the first captured image as first observation coordinates (x2, y2) viewed from the first direction;
• (c4) specifying a fourth portion of the multilayer structure which is exposed on the observation surface in the second captured image and which corresponds to a coordinate x2 of the first observation coordinates (x2, y2) as second observation coordinates (x2, z2) viewed from the second direction;
• and
• (c5) calculating a depth of the second observation coordinates (x2, z2) from the second reference coordinates (x1, z1);
• wherein the depth information of the multilayer structure includes the depth of the second observation coordinates (x2, z2) from the second reference coordinates (x1, z1);
• wherein the step (c) further includes:
• (c6) calculating a number of layers of the second observation coordinates (x2, z2) from the second reference coordinates (x1, z1) by comparing information of the sample with a calculation result of the step (c5);
• and
• (c7) after the step (c6), when the second reference coordinates (x1, z1) are located on the first layer of the multilayer structure, calculating a depth and a number of layers of the second observation coordinates (x2, z2) from the upper surface of the sample;
• wherein the depth information of the multilayer structure further includes the number of layers of the second observation coordinates (x2, z2) from the second reference coordinates (x1, z1), and the depth and the number of layers of the second observation coordinates (x2, z2) from the upper surface of the sample.