Liquid chemical and method for producing liquid chemical
AssigneeFUJIFILM Corporation
InventorTetsuya Kamimura
Life of this patent
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Abstract
An object of the present invention is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by EUV exposure. Another object thereof is to provide a method for producing a liquid chemical. The liquid chemical of the present invention includes an organic solvent, and metal-containing particles containing a metal atom, in which the number of metal nanoparticles contained in the metal-containing particles and having a particle size of 0.5 to 17 nm is 1.0×101 to 1.0×109 particles/cm3, based on the number of the particles per unit volume of the liquid chemical.
Claims14
A liquid chemical comprising:
- an organic solvent;
- and
- metal-containing particles containing a metal atom,
- wherein the number of metal nanoparticles contained in the metal-containing particles and having a particle size of 0.5 to 17 nm is 1.0×101 to 1.0×109 particles/cm3, based on the number of the particles per unit volume of the liquid chemical,
- the metal nanoparticles include metal nanoparticles containing a Pb atom and metal nanoparticles containing a Ti atom,
- a ratio of the number of the metal nanoparticles containing a Pb atom to the number of the metal nanoparticles containing a Ti atom is 1.0×10−3 to 9.0×10−1, based on the number of the particles per unit volume of the liquid chemical,
- the metal nanoparticles consist of at least one selected from the group consisting of particles A consisting of a simple substance of the metal atom, particles B consisting of an oxide of the metal atom, and particles C consisting of a simple substance of the metal atom and an oxide of the metal atom,
- a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained 1.0×10−1 or less, based on the number of the particles per unit volume of the liquid chemical, and
- the liquid chemical includes no resin.
Dependencies are inferred from the claim text.