Actuator and beam steering mechanism using an actuator

A beam steering mechanism comprising:

• a mirror comprising a first surface and a second surface opposite to the first surface, the first surface being a mirrored surface;
• a flexure having a first surface and a second surface, the first surface of the flexure being fixed to the second surface of the mirror;
• a frame;
• a plurality of supports, each of the plurality of the supports having a first end fixed to the frame and a second end fixed to the flexure;
• a pivot anchor having a first end fixed to the frame, and a second end connected to a pivot point of the second surface of the mirror through a hole in the flexure or connected to a pivot point of the second surface of the flexure;
• and
• a first actuator comprising a first output end, the first output end of the first actuator being connected to the flexure at a first point,
• wherein the first actuator comprises
• a first motor comprising a first magnet and a first coil;
• a first stator structured to support the first magnet;
• a first stationary pole arranged coaxially with the first stator and provided to a radially inner side of the first magnet;
• a first bobbin structured to support a first winding of the first coil,
• a first non-contact position detector subsystem that is mounted along a first path over which the first bobbin moves;
• and
• a first flexible circuit connected between the first coil that is supported by the first bobbin and a first energy source, the first flexible circuit providing energy to the first coil and constraining rotation of the first bobbin relative to the first stator,
• wherein the first stationary pole is ground with a precision such that residual rotation of the first bobbin resulting from a yield of the first flexible circuit does not affect an accuracy of the first non-contact position detector subsystem.