Micromechanical sensor having increased sensitivity and a MEMS component having such a sensor

Abstract

A micro-electromechanical sensor. The micro-electromechanical sensor includes a substrate and a sensor element that can be resiliently deflected relative to the substrate is described. The sensor element is designed in the shape of a rocker having a light side and a heavy side, wherein the light side of the sensor element has a smaller layer thickness in at least one functional region than has the heavy side of the sensor element. An opening having a flexible stop structure is formed in the functional region. A reinforcing structure at least partially surrounding the opening is also provided in the functional region. The reinforcing structure is at least partially realized by an alternating sequence of anchor segments and connecting segments. The connecting segments have a smaller width than the anchor segments.

Dependencies are inferred from the claim text.