Back to results
US 12,650,395 B2Granted
Sensor and sensor system
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Akimoto, Hiroaki Yamazaki
Life of this patent
Estimating the term…
Abstract
A sensor includes a base including a first region and a second region; and a first sensor section. The first sensor section includes a first support portion fixed to the first region, a first structure, and a first film portion. The first structure is supported by the first support portion. The first structure includes a first resistance member. A first direction from the second region to the first structure crosses a second direction from the first region to the second region. The first film portion is fixed to the first region. A first gap is provided between the second region and the first film portion. A second gap is provided between the first film portion and the first structure.
Claims18
A sensor, comprising:
- a base including a first region and a second region;
- and
- a first sensor section,
- the first sensor section including
- a first support portion fixed to the first region,
- a first structure supported by the first support portion, the first structure including a first resistance member, a first direction from the second region to the first structure crossing a second direction from the first region to the second region, and
- a first film portion fixed to the first region, a first gap being provided between the second region and the first film portion, a second gap being provided between the first film portion and the first structure,
- wherein
- a first pressure in a first space between the second region and the first film portion is lower than a second pressure in a second space between the first film portion and the first structure,
- the first space is sealed by the second region and the first film portion,
- the first sensor section further includes a first intermediate film,
- the first intermediate film is provided between the second region and the first film portion, and is fixed to the first film portion,
- the first intermediate film includes a first hole piercing the first intermediate film in the first direction, and
- the first gap is provided between the second region and the first intermediate film.
11 more elements
A sensor, comprising:
- a base including a first region and a second region;
- a first sensor section;
- and
- a controller,
- the first sensor section including
- a first support portion fixed to the first region,
- a first structure supported by the first support portion, the first structure including a first resistance member, a first direction from the second region to the first structure crossing a second direction from the first region to the second region, and
- a first film portion fixed to the first region, a first gap being provided between the second region and the first film portion, a second gap being provided between the first film portion and the first structure,
- a first pressure in a first space between the second region and the first film portion being lower than a second pressure in a second space between the first film portion and the first structure,
- a first film portion distance between the second region and the first film portion being variable according to a pressure in the second space,
- the first structure further including a first conductive member,
- the controller being configured to increase a temperature of the first structure by supplying power to the first conductive member, and
- the controller being configured to detect a change in a first electrical resistance of the first resistance member according to a change in the temperature of the first structure.
10 more elements
A sensor, comprising:
- a base including a first region and a second region;
- a first sensor section;
- and
- a controller,
- the first sensor section including
- a first support portion fixed to the first region,
- a first structure supported by the first support portion, the first structure including a first resistance member, a first direction from the second region to the first structure crossing a second direction from the first region to the second region, and
- a first film portion fixed to the first region, a first gap being provided between the second region and the first film portion, a second gap being provided between the first film portion and the first structure,
- the first structure further including a first conductive member,
- the controller being configured to increase a temperature of the first structure by supplying power to the first conductive member, and
- the controller being configured to detect a change in a first electrical resistance of the first resistance member according to a change in the temperature of the first structure.
8 more elements
Dependencies are inferred from the claim text.