US 12,650,373 B2 · Particle measuring apparatus and manufacturing method thereof

Abstract

Disclosed is a particle-measuring device, including: a measurement part including first and second electrodes and measuring a mass of particles with a change in signals transmitted and received between the first and second electrodes, wherein the first and second electrodes are patterned on a base made of a piezoelectric material and transmit/receive signals to/from each other; and an adsorption part provided in an adsorption region between the first and second electrodes and configured to adsorb fine particles according to a temperature change. According to such a configuration, the particle-measuring device does not interfere with the resonance rate of a piezoelectric material while having a high adsorption rate, thereby providing excellent particle measurement quality.

Claims12

Dependent claims

A particle-measuring device comprising:

a measurement part comprising a first electrode and a second electrode patterned on a base made of a piezoelectric material and a control circuit electrically connected to the first electrode and the second electrode;
and
an adsorption part provided in an adsorption region between the first electrode and the second electrode and configured to adsorb particles according to a temperature change,
wherein the control circuit applies an alternating-current (AC) excitation to the first electrode, and detects, at the second electrode, a vibration-induced electrical response communicated through the base across an inter-electrode region including the adsorption part, and
wherein the control circuit measures a mass of particles adsorbed on the adsorption part by comparing a change in the detected electrical response with the applied AC excitation.

2 more elements

Dependencies are inferred from the claim text.

Particle measuring apparatus and manufacturing method thereof

Life of this patent

Particle measuring apparatus and manufacturing method thereof

Life of this patent

Abstract

Claims12