Back to results
US 12,650,350 B2Granted
Shear force sensor, and detection unit for shear force sensor
AssigneeNissha Co., Ltd.
InventorsAyuko Tsuruoka, Yuji Watazu
Life of this patent
Estimating the term…
Abstract
A thin and durable detection unit for a shear force sensor is disclosed. The detection unit detects shear forces in a plurality of directions. A detection circuit is connected to a first electrode layer and a second electrode layer. First driving electrodes and second driving electrodes insulated from each other by first isolation trenches are formed in the first electrode layer. The second driving electrodes also serving as third driving electrodes and the first driving electrodes also serving as fourth driving electrodes insulated from each other by second isolation trenches are formed in the first electrode layer. First detection electrodes and second detection electrodes are formed in the second electrode layer.
Claims20
A shear force sensor comprising:
- a first electrode layer and a second electrode layer opposite to each other;
- an insulating elastic body layer that is located between the first electrode layer and the second electrode layer to electrically insulate both the electrode layers and is elastically deformable in a first in-plane direction of the first electrode layer;
- and
- a detection circuit connected to the first electrode layer and the second electrode layer, wherein:
- a first driving electrode and a second driving electrode insulated from each other by a first isolation trench are formed in the first electrode layer,
- a third driving electrode and a fourth driving electrode insulated from each other by a second isolation trench are formed in the first electrode layer,
- the first isolation trench has a first portion extending in a first direction in the first in- plane direction, and the second isolation trench has a second portion extending in a second direction in the first in-plane direction, the first direction and the second direction being directions crossing each other,
- a first detection electrode overlapped on the first driving electrode, the first portion of the first isolation trench, and the second driving electrode when viewed in a first normal direction perpendicular to the first in-plane direction is formed in the second electrode layer,
- a second detection electrode overlapped on the third driving electrode, the second portion of the second isolation trench, and the fourth driving electrode when viewed in the first normal direction is formed in the second electrode layer, and
- wherein the detection circuit
- detects a first shear force exerted in a first shear direction perpendicular to the first direction in the first in-plane direction based on a change in a first capacitance produced between the first driving electrode and the first detection electrode and a change in a second capacitance produced between the second driving electrode and the first detection electrode, and
- detects a second shear force exerted in a second shear direction perpendicular to the second direction in the first in-plane direction based on a change in a third capacitance produced between the third driving electrode and the second detection electrode and a change in a fourth capacitance produced between the fourth driving electrode and the second detection electrode.
9 more elements
A detection unit for a shear force sensor, comprising:
- a first electrode layer and a second electrode layer opposite to each other;
- and
- an insulating elastic body layer that is located between the first electrode layer and the second electrode layer to electrically insulate both the first and the second electrode layers and is elastically deformable in a first in-plane direction of the first electrode layer, wherein
- a first driving electrode and a second driving electrode insulated from each other by a first isolation trench are formed in the first electrode layer,
- a third driving electrode and a fourth driving electrode insulated from each other by a second isolation trench are formed in the first electrode layer,
- the first isolation trench has a first portion extending in a first direction in the first in-plane direction, and the second isolation trench has a second portion extending in a second direction in the first in-plane direction, the first direction and the second direction being directions crossing each other,
- a first detection electrode overlapped on the first driving electrode, the first portion of the first isolation trench, and the second driving electrode when viewed in a first normal direction perpendicular to the first in-plane direction is formed in the second electrode layer, and
- a second detection electrode overlapped on the third driving electrode, the second portion of the second isolation trench, and the fourth driving electrode when viewed in the first normal direction is formed in the second electrode layer.
5 more elements
Dependencies are inferred from the claim text.