Sensors for measuring pressure and temperature
AssigneeSimmonds Precision Products, Inc.
InventorsKristen Brosnan, Peter J. Carini
Life of this patent
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Abstract
A Fabry-Pérot sensor assembly includes an optical element defining a Fabry-Pérot optical cavity therein. A ferrule is affixed to the optical element. The ferrule is configured to physically connect to an optic fiber, aligning the optic fiber optically with the cavity. The optical element includes a MgAl2O4 spinel or aluminum oxynitride Al23N27O5. A method of making an Fabry-Pérot optical cavity includes using a ceramic processing etching process to remove material from a first optical member to form the cavity therein, leaving a rim of the optical member surrounding the cavity peripherally. The method includes affixing a second optical member to the rim to enclose the cavity.
Claims15
A Fabry-Perot sensor assembly comprising:
- an optical element comprising:
- a first end opposite a second end relative to a longitudinal axis of the Fabry-Perot sensor assembly;
- a first optical member at the first end;
- a second optical member at the second end, wherein the second optical member comprises a diaphragm, and wherein the diaphragm deflects more than the first optical member to pressure changes external to the optical element;
- a reflective coating connected to the diaphragm and facing the first optical member;
- an optical cavity between the first end and the second end;
- and
- a ring-shaped mirror attached to a surface of the first optical member and facing the second optical member, wherein the ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and contains an optical fiber;
- and
- a sensor ferrule affixed to the first end of the optical element and defines the bore for receiving the optical fiber that extends along the longitudinal axis to the optical element, wherein the sensor ferrule is configured to physically connect to the optical fiber, optically aligning and spacing the optical fiber with the optical cavity, wherein the optical element includes MgA12O4 spinel or aluminum oxynitride A123N27O5.
A method of making a Fabry-Perot optical element comprising:
- forming a first optical member comprising MgAl2O4 spinel or aluminum oxynitride Al23N27O5;
- forming a second optical member comprising a diaphragm, and comprising MgAl2O4 spinel or aluminum oxynitride Al23N27O5;
- creating a reflective coating on a first side of the second optical member, wherein the first side of the second optical member is formed by the diaphragm;
- connecting a ring-shaped mirror on a first side of the first optical member, wherein the first side of the first optical member faces the first side of the second optical member, wherein the ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and contains an optical fiber;
- and
- connecting the first optical member to the second optical member such that the first optical member forms a first end of the optical element and the diaphragm of the second optical member forms a second end of the optical element, wherein the reflective coating of the second optical member faces the first optical member, and wherein an optical cavity is formed between the first end and the second end.
A Fabry-Perot sensor assembly comprising:
- an optical element comprising:
- a first end opposite a second end relative to a longitudinal axis of the Fabry-Perot sensor assembly;
- a first optical member at the first end, further comprising:
- a first side;
- a second optical member at the second end, wherein the second optical member comprises a diaphragm, and wherein the diaphragm deflects more than the first optical member to pressure changes external to the optical element;
- a reflective coating connected to the diaphragm and facing the first side of the first optical member and adjacent to the diaphragm;
- a ring-shaped mirror connected to the first side of the first optical member and facing the reflective coating, wherein the ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and contains the optical fiber;
- and
- an optical cavity between the first optical member and the second optical member;
- and
- a sensor ferrule affixed to the first end of the optical element, wherein the sensor ferrule is configured to physically connect to the optical fiber, optically aligning and spacing the optical fiber with the optical cavity, and wherein the optical element includes MgA12O4 spinel or aluminum oxynitride A123N27O5.
Dependencies are inferred from the claim text.