Method for operating a pump system
AssigneeLeybold Aktiengesellschaft
InventorsYun Shi, Joeri Coeckelbergs
Life of this patent
Estimating the term…
Abstract
Method for operating a pump system having more than one pump, including the steps of: Obtaining at least one target parameter to be optimized based on target values of each pump; Obtaining an operation target, wherein the operation target is provided by one or more of the pumps operating each with an individual operation parameter; Acquiring a relationship for more than one and preferably all of the pumps between the operation parameter and the target value and determine a target function; Determining a maximum/minimum of the target function and obtaining operation parameter of at least one pump; and Controlling of at least one pump to operate with the obtained operation parameter to optimize the target parameter.
Claims8
A method for operating a vacuum pump system comprising a plurality of pumps, the method comprising steps of:
- obtaining a target parameter to be optimized for the vacuum pump system as a whole;
- obtaining an operation target, wherein the operation target is provided by the plurality of pumps operating together with each pump in the plurality of pumps providing a respective operation parameter that contributes to the operation target and wherein the operation target is a flow level or pressure level required to be provided by the vacuum pump system when the vacuum pump system is operating;
- performing a first run of adjusting the operation parameters of the plurality of pumps to move the target parameter toward an optimum value for the target parameter while requiring that the operation target is met, wherein during the first run a fixed speed pump of the plurality of pumps is considered as a variable speed pump;
- determining that the first run of adjusting the operation parameters resulted in the fixed speed pump being assigned a speed that is greater than zero and less than a full speed of the fixed speed pump, and in response, performing a second run of adjusting the operation parameters of the plurality of pumps to move the target parameter toward the optimum value for the target parameter while requiring that the operation target is met so that the speed of the fixed speed pump is either zero or the full speed to provide adjusted operation parameters for the plurality of pumps, wherein a step size associated with adjusting the operation parameter of the fixed speed pump is larger for the second run than for the first run;
- and
- controlling the plurality of pumps to operate with the adjusted operation parameters.
Dependencies are inferred from the claim text.