Vapor delivery device
AssigneeLam Research Corporation
InventorsThadeous Bamford, Jorge Reyes, Emile Draper
Life of this patent
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Abstract
An evaporator assembly for a processing chamber in a substrate processing system comprises a canister configured to store and heat precursor liquid and an evaporator valve block mounted the canister. The evaporator valve block comprises a body, a plurality of valves mounted on the body, a carrier gas inlet in fluid communication with the canister, a precursor liquid inlet in fluid communication with the canister, a vapor port in fluid communication with the canister, and a vapor outlet in fluid communication with the processing chamber. Each of the plurality of valves is in fluid communication with respective flow paths contained within the evaporator valve block.
Claims20
An evaporator assembly for a processing chamber in a substrate processing system, the evaporator assembly comprising:
- a canister configured to store and heat precursor liquid;
- and
- an evaporator valve block mounted the canister, wherein the evaporator valve block includes
- a body,
- a plurality of valves mounted on the body,
- a carrier gas inlet in fluid communication with the canister,
- a precursor liquid inlet in fluid communication with the canister,
- a vapor port in fluid communication with the canister, and
- a vapor outlet in fluid communication with the processing chamber,
- wherein each of the plurality of valves is in fluid communication with respective flow paths contained within the evaporator valve block, and
- wherein each of the carrier gas inlet, the precursor liquid inlet and the vapor port define separate openings in the canister.
An evaporator assembly for a processing chamber in a substrate processing system, the evaporator assembly comprising:
- a canister configured to store and heat precursor liquid;
- and
- an evaporator valve block mounted the canister, wherein the evaporator valve block includes
- a body,
- a plurality of valves mounted on the body,
- a carrier gas inlet in fluid communication with the canister,
- a precursor liquid inlet in fluid communication with the canister,
- a vapor port in fluid communication with the canister, and
- a vapor outlet in fluid communication with the processing chamber,
- wherein each of the plurality of valves is in fluid communication with respective flow paths contained within the evaporator valve block, and
- wherein the carrier gas inlet and the vapor port are located on opposite sides of the evaporator valve block.
An evaporator assembly for a processing chamber in a substrate processing system, the evaporator assembly comprising:
- a canister configured to store and heat precursor liquid;
- an evaporator valve block mounted the canister, wherein the evaporator valve block includes
- a body,
- a plurality of valves mounted on the body,
- a carrier gas inlet in fluid communication with the canister,
- a precursor liquid inlet in fluid communication with the canister,
- a vapor port in fluid communication with the canister, and
- a vapor outlet in fluid communication with the processing chamber;
- and
- an inlet tube extending downward from the precursor liquid inlet into the canister,
- wherein each of the plurality of valves is in fluid communication with respective flow paths contained within the evaporator valve block.
Dependencies are inferred from the claim text.