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US 12,649,968 B2Granted
Molybdenum nitride based multilayer coating for wear and friction reduction
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsTimea Stelzig, Astrid Gies, Juergen Becker
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Abstract
Method for the production of a Mo—N-based coating structure, including: providing a substrate to be coated and applying a hard material layer on the substrate, wherein the hard material layer includes at least one layer of Mo—N having a hexagonal crystal structure and at least one layer of Mo—N having a cubic crystal structure or a mixed hexagonal/cubic crystal structure, wherein the hard material layer is applied by a low temperature closed field unbalanced reactive magnetron sputtering coating process.
Claims25
A Mo—N-based coating structure, comprising:
- a substrate, and
- a hard material layer applied on the substrate, wherein the hard material layer comprises at least one layer of Mo—N having a hexagonal crystal structure and at least one layer of Mo—N having a cubic crystal structure or a mixed hexagonal/cubic crystal structure,
- wherein the at least one layer of Mo—N having a hexagonal crystal structure has a proportion of more than 95% hexagonal crystal structure, and
- wherein the at least one layer of Mo—N having a cubic crystal structure or a mixed hexagonal/cubic crystal structure has a proportion of more than 95% cubic crystal structure or 50% cubic crystal structure, respectively.
1 more element
Dependencies are inferred from the claim text.