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US 12,649,687 B2Granted
Method for producing ring-shaped object, film-forming device, ring-shaped object, and hard disk drive device
AssigneeHoya Corporation
InventorsMasafumi Miura, Kazuaki Hashimoto
Life of this patent
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Abstract
A method for producing a ring-shaped object includes: placing a ring-shaped substrate on a plate; and spraying a gas containing a coating raw material toward a center hole of the ring-shaped substrate from above the ring-shaped substrate placed on the plate to cause the ring-shaped substrate to float up from the plate and form a film on a surface of the ring-shaped substrate.
Claims9
A method for producing a ring-shaped object, comprising:
- placing a ring-shaped substrate on a plate;
- and
- spraying a gas containing a coating raw material toward a center hole of the ring-shaped substrate from above the ring-shaped substrate placed on the plate to cause the ring-shaped substrate to float up from the plate and form a film on a surface of the ring-shaped substrate.
A method for producing a ring-shaped object, comprising:
- heating processing of placing a ring-shaped substrate on a placement table to heat the ring-shaped substrate;
- and
- film formation processing of spraying a gas containing a coating raw material toward the ring-shaped substrate to cause the ring-shaped substrate to float up from the placement table and form a film on a surface of the ring-shaped substrate.
Dependencies are inferred from the claim text.