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US 12,649,658 B2Granted
Method of manufacturing silicon nano-powders and manufacturing equipment implementing such method
AssigneeNational Taiwan University
InventorChung-Wen Lan
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Abstract
A method of manufacturing silicon nano-powders and a manufacturing equipment implementing such method. The method according to the invention utilizes a plurality of aluminum powders to react with a silicon tetrahalide into a plurality of silicon nano-powders and an aluminum trihalide to obtain the silicon nano-powders.
Claims5
A method of manufacturing a plurality of silicon nano-powders, comprising the steps of:
- preparing a plurality of aluminum powders and a silicon tetrahalide;
- and
- heating the plurality of aluminum powders and the silicon tetrahalide to a reaction temperature such that the plurality of aluminum powders react with a reaction gas of the silicon tetrahalide into a plurality of silicon nano-powders and an aluminum trihalide, to obtain the plurality of silicon nano-powders, wherein the reaction temperature ranges from 100° C. to 660° C.
Dependencies are inferred from the claim text.