Micro electro-mechanical system sensor
AssigneeSamsung Electronics Co., Ltd.
InventorsChoongho Rhee, Sungchan Kang, Cheheung Kim, Yongseop Yoon
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Abstract
Provided is a micro electro-mechanical system (MEMS) sensor including a substrate including a first cavity, a first frame including a second cavity at least partially overlapping the first cavity, at least a portion of the first frame being spaced apart from the substrate, a plurality of resonators, each of the plurality of resonators including a first end connected to the first frame and a second end extending into the second cavity, and a second frame including a first region connected to the first frame and a second region spaced apart from the first frame and connected to the substrate.
Claims22
A micro electro-mechanical system (MEMS) sensor comprising:
- a substrate including a first cavity;
- a first frame including a second cavity at least partially overlapping the first cavity in a first direction, at least a portion of the first frame being spaced apart from the substrate;
- a plurality of resonators, each of the plurality of resonators comprising a first end connected to the first frame and a second end extending into the second cavity;
- and
- a second frame comprising a first region connected to the first frame and a second region spaced apart from the first frame in a second direction perpendicular to the first direction and a third direction perpendicular to the first direction and the second direction, the second frame being connected to the substrate,
- wherein a width of the first region in the third direction is greater than or equal to a width, in the third direction, of a portion of the second region and a width, in the second direction, of a remaining portion of the second region.
A micro electro-mechanical system (MEMS) sensor comprising:
- a substrate including a first cavity;
- a first frame including a second cavity at least partially overlapping the first cavity in a first direction, at least a portion of the first frame being spaced apart from the substrate;
- a plurality of resonators, each of the plurality of resonators comprising a first end connected to the first frame and a second end extending into the second cavity;
- and
- a second frame provided adjacent to the first frame, the second frame comprising:
- a first region connected to the first frame and partially spaced apart from the substrate;
- and
- a second region spaced apart from the first frame in a second direction perpendicular to the first direction and a third direction perpendicular to the first direction and the second direction, the second frame being connected to the substrate,
- wherein a width of the first region in the third direction is greater than or equal to a width, in the third direction, of a portion of the second region and a width, in the second direction, of a a remaining portion of the second region.
Dependencies are inferred from the claim text.