Polishing apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJunhee Bae, Jinsoo Shin, Hyunhee Lee, Seungpyo Hong
Life of this patent
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Abstract
A polishing apparatus includes a shank including a rotation shaft extending in a first direction, a first cushion unit covering a side surface of the shank and having a first hardness, a first film unit adjacent to the first cushion unit in a second direction crossing the first direction and covering a side surface of the first cushion unit, a second cushion unit disposed below the shank, having a second hardness different from the first hardness, and including a first part and a second part. The first part has a cylindrical shape and the second part is disposed below the first part and has a conical shape protruding in a direction opposite to the first part, and a second film unit covering the second part.
Claims20
A polishing apparatus comprising:
- a shank including a rotation shaft extending in a first direction;
- a first cushion unit covering a side surface of the shank and having a first hardness;
- a first film unit adjacent to the first cushion unit in a second direction crossing the first direction and covering a side surface of the first cushion unit;
- a second cushion unit disposed below the shank, having a second hardness different from the first hardness, and including a first part and a second part,
- wherein the first part has a cylindrical shape and the second part is disposed below the first part and has a conical shape protruding in a direction opposite to the first part;
- and
- a second film unit covering the second part.
A polishing apparatus comprising:
- a shank including a rotation shaft extending in a first direction;
- a first cushion unit including a first core covering a side surface of the shank and a first processing part covering a side surface of the first core, wherein the first core has a first hardness;
- and
- a second cushion unit disposed below the shank, having a second hardness different from the first hardness, and including a second core and a second processing part, wherein the second core has a first part and a second part disposed below the first part and the second processing part covers the second part,
- wherein the first part has a cylindrical shape and the second part has a conical shape.
Dependencies are inferred from the claim text.