Reflow method and system

A system for reflowing a semiconductor workpiece, comprising:

• a stage, comprising:
• a base;
• and
• a plurality of protrusions, connected to the base and each comprising a first portion and a second portion surrounded by and spatially separated from the first portion;
• a plurality of first vacuum modules, coupled to the first portions comprised in the plurality of protrusions;
• a plurality of second vacuum modules, coupled to the second portions comprised in the plurality of protrusions;
• an energy source, disposed over the stage to heat the semiconductor workpiece in contact with a respective one of the plurality of protrusions of the stage;
• and
• at least one carrier, disposed between the stage and the energy source, wherein the at least one carrier is configured to hold the semiconductor workpiece in a proper position so to be in contact with the respective one of the plurality of protrusions of the stage, wherein the at least one carrier is disposed between the stage and the semiconductor workpiece.

A system for reflowing a semiconductor workpiece, comprising:

• a stage, comprising:
• a base;
• and
• a protrusion, disposed on the base and comprising:
• an inner portion;
• an outer ring portion, enclosed the inner portion;
• a spacer, interposing between the inner portion and the outer ring portion;
• and
• a protection portion;
• laterally covering the outer ring portion,
• wherein an area of the protrusion is less than an area of the semiconductor workpiece in a top view along a stacking direction of the base and the protrusion;
• a first vacuum module, coupled to the inner portion;
• a second vacuum module, coupled to the outer ring portion;
• an energy source, disposed over the stage to heat the semiconductor workpiece placed over the protrusion;
• a conveyor mechanism, disposed between the stage and the energy source;
• and
• an operating device, disposed underneath the conveyor mechanism and coupled to the stage, the first vacuum module, and the second vacuum module to controllably operating thereto.