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US 12,649,176 B2Granted
Washing apparatus
AssigneeEbara Corporation
InventorsDaichi Kondo, Koji Maeda, Kuniaki Yamaguchi, Koichi Fukaya, Kohei Sato
Life of this patent
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Abstract
A washing apparatus includes: a housing; a holding part that holds a substrate arranged in the housing; a washing nozzle that supplies a washing liquid to the substrate held by the holding part; a gas nozzle that ejects a gas toward a ceiling of the housing; and a control part that controls the gas nozzle.
Claims5
A washing apparatus comprising:
- a housing;
- a holding part that holds a substrate arranged in the housing;
- a washing nozzle that supplies a washing liquid to the substrate held by the holding part;
- a gas nozzle that ejects a gas toward a ceiling of the housing;
- a control part that controls the gas nozzle;
- and
- a detection part that detects droplets adhered to the ceiling,
- wherein the control part causes the gas to be ejected from the gas nozzle upon detection of the droplets by the detection part.
5 more elements
Dependencies are inferred from the claim text.