Self-aligning bonding by hydrophilic contrast
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsPierre Montmeat, Frank Fournel, Thierry Enot
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Abstract
A manufacturing method of a structure intended for assembly with another structure by self-aligning bonding by hydrophilic contrast, including the following successive steps: a) definition of pads on the side of the first face of a first substrate; b) transfer of a second substrate on the side of the first face of the first substrate; c) formation on the sides and/or on a peripheral part of the upper face of the pads, of a material more hydrophobic than a material of the upper face of the pads; and d) removal of the second substrate.
Claims13
A manufacturing method for a structure intended to be assembled with another structure by self-aligning bonding by hydrophilic contrast, comprised of the following successive steps:
- a) definition of pads on the side of a first face of a first substrate;
- b) transfer of a second substrate on the side of the first face of the first substrate;
- c) deposition, on the sides and/or on a surrounding part of the upper face of the pads of a material more hydrophobic than a material of the upper face of the pads;
- d) removal of the second substrate;
- and
- in which the material of the upper face of the pads and the material coating the side of the pads have a difference in water droplet contact angle greater than 20°.
Dependencies are inferred from the claim text.