Substrate carrier

A substrate carrier comprising:

• a stainless-steel enclosure to hold more than one substrate aligned vertically, the stainless-steel enclosure comprising,
• walls configured to surround the substrates, wherein the walls comprise a front panel, a back panel parallel to the front panel, and two side panels perpendicular to the front and back panels and to the substrates,
• a top opening, and
• a bottom opening;
• an adjustable clamping mechanism on each of the two side panels, the adjustable clamping mechanism comprising,
• a plurality of pairs of jaws that are each configured to clamp one of the substrates, wherein the jaws in each pair face one another with an intervening gap that is configured to accommodate the one of the substrates, and wherein each pair of jaws comprises a fixed jaw and a movable jaw, and wherein the intervening gap is adjustable by moving the movable jaw,
• a movable support attached to the movable jaws,
• a moving mechanism attached to the movable support, and
• a controller coupled to the moving mechanism, the controller configured to control positions of the movable jaws by moving the movable support;
• a locking mechanism on each of the two side panels, configured to lock positions of the movable jaws to fix positions of the substrates within the stainless-steel enclosure.

A system for wet processing a plurality of substrate, the system comprising:

• a vessel filled with a treatment fluid, configured to receive a substrate carrier holding a plurality of substrates;
• a temperature controller to maintain a temperature of the treatment fluid in the vessel;
• an agitation mechanism to provide an agitation to the substrate carrier during a wet processing of the plurality of substrates;
• and
• the substrate carrier, comprising,
• an enclosure to hold the plurality of substrates, the enclosure comprising,
• walls configured to surround the plurality of substrates,
• a top opening, and
• a bottom opening, wherein the walls comprise a front panel, a back panel parallel to the front panel, and two side panels perpendicular to the front and back panels and to the plurality of substrates;
• and
• an adjustable clamping mechanism on each of the two side panels, the adjustable clamping mechanism comprising a plurality of pairs of jaws that are each configured to clamp a substrate of the plurality of substrates, wherein the jaws in each pair face one another with an intervening gap that is configured to accommodate a substrate.