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US 12,648,407 B2Granted
Wafer transport method and apparatus
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Hung Hsiao, Chi-Chung Jen, Yu-Chun Shen, Yuan-Cheng Kuo, Chih-Hsiung Huang, Wen-Chih Chiang
Life of this patent
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Abstract
A wafer container includes a frame, a door and at least a pair of shelves. The frame has opposite sidewalls. The pair of the shelves are respectively disposed and aligned on the opposite sidewalls of the frame. Various methods and devices are provided for holding at least one wafer to the shelves during transport.
Claims20
A wafer container apparatus, comprising:
- a pair of opposing sidewalls disposed within a frame;
- a pair of shelves disposed on the sidewalls, wherein the pair of shelves includes at least one engagement arm thereon that is adjustable in length and configured to secure a wafer;
- and
- a settler for securing the wafer on the pair of shelves by gripping an edge of the wafer.
1 more element
An apparatus for carrying wafers, comprising:
- a frame;
- a first sidewall and a second sidewall disposed on opposite sides of the frame;
- a first shelf disposed on the first sidewall;
- a second shelf disposed on the second sidewall and separated by a distance from the first shelf, the first shelf and the second shelf configured to cooperatively support a wafer;
- a securing arm disposed towards an interior end of at least one of the first shelf and the second shelf;
- and
- an adjuster configured to change a position of the securing arm in order to secure the wafer by gripping an edge of the wafer.
4 more elements
A method for securing a wafer within a wafer container, comprising:
- robotically opening a door of a container;
- robotically inserting a wafer onto a shelf disposed within the container;
- and
- adjusting a position of a securing arm disposed on the shelf, the securing arm configured to secure the wafer by gripping an edge of the wafer.
1 more element
Dependencies are inferred from the claim text.