Substrate processing system

A substrate processing system that performs batch processing for processing a plurality of substrates at once, and performs single-wafer processing for processing a single substrate at a time, among the plurality of substrates, the substrate processing system comprising:

• a transfer device including a carrier shelf on which a carrier is placed, the carrier being configured to store the plurality of substrates in a horizontal orientation, with a predetermined interval between the plurality of substrates;
• a batch processing device that processes the plurality of substrates at once;
• and
• a single-wafer processing device that processes a single substrate at a time, among the plurality of substrates, wherein
• the transfer device, the single-wafer processing device, and the batch processing device are linearly arranged in a row in an order listed herein,
• the transfer device includes a first orientation converting unit that converts the plurality of substrates taken out from the carrier on the carrier shelf, from the horizontal orientation to a vertical orientation,
• the single-wafer processing device includes:
• a plurality of single-wafer processing units that processes a single substrate at a time, among the plurality of substrates;
• and
• a first substrate transport mechanism that transports the plurality of substrates to the plurality of single-wafer processing units,
• the batch processing device includes:
• a batch processing unit that processes the plurality of substrates at once;
• and
• a first batch transport mechanism that transports the plurality of substrates to the batch processing unit at once, and
• the first batch transport mechanism receives, on a side of the transfer device, the plurality of substrates having been converted by the first orientation converting unit to the vertical orientation, and transports the plurality of substrates directly to the batch processing unit without using the first substrate transport mechanism included in the single-wafer processing device.