Systems and methods for tray cassette warehousing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsung-Sheng Kuo, Yang-Ann Chu, Chih-Hung Huang, Guan-Wei Huang, Jiun-Rong Pai, Hsuan Lee
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsung-Sheng Kuo, Yang-Ann Chu, Chih-Hung Huang, Guan-Wei Huang, Jiun-Rong Pai, Hsuan Lee
Estimating the term…
A system, includes, a semiconductor processing unit, an Automated Materials Handling System (AMHS) vehicle, and a warehouse apparatus, wherein the warehouse apparatus comprises at least one input port, at least one output port, and at least one load/unload port, wherein the warehouse apparatus is configured to perform one of the following: receiving a plurality of tray cassette containers from the AMHS vehicle at the at least one input port, transporting at least one tray cassette in each of a plurality of tray cassette containers to the at least one load/unload port via the at least one input port, transporting at least one first tray from the at least one tray cassette to the semiconductor processing unit via a tray feeder conveyor, and receiving at least one second tray from the semiconductor processing unit via the tray feeder conveyor.
A system, comprising:
A system, comprising:
A method, comprising:
Dependencies are inferred from the claim text.