Memory device and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYen-Lin Huang, MingYuan Song, Chien-Min Lee, Shy-Jay Lin, Chi-Feng Pai, Chen-Yu Hu, Chao-Chung Huang, Kuan-Hao Chen, Chia-Chin Tsai, Yu-Fang Chiu, Cheng-Wei Peng
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