Manufacturing method of display device and evaporation device

A manufacturing method of a display device, comprising:

• preparing a processing substrate by forming a lower electrode above a substrate, forming a rib comprising an aperture overlapping the lower electrode, and forming a partition including a lower portion located on the rib and an upper portion located on the lower portion and protruding from a side surface of the lower portion;
• forming an organic layer on the lower electrode in the aperture;
• and
• forming an etching stopper layer on the organic layer, wherein
• the forming the etching stopper layer includes:
• carrying the processing substrate into a chamber;
• inside the chamber, emitting a material for forming the etching stopper layer from an evaporation source which inclines with respect to a normal of the processing substrate;
• and
• conveying the processing substrate while rotating the processing substrate in a plane orthogonal to the normal, and depositing the material emitted from the evaporation source on the processing substrate.