Continuous plasma processing system with adjustable electrode
AssigneeUVAT Technology Co., LTd.
InventorsYuan-Chi Lee, Pin-Chun Liu, Chun-Chieh Yang, Ming-Chan Tsai, Chih-Ming Lu
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AssigneeUVAT Technology Co., LTd.
InventorsYuan-Chi Lee, Pin-Chun Liu, Chun-Chieh Yang, Ming-Chan Tsai, Chih-Ming Lu
Estimating the term…
A continuous plasma processing system with adjustable electrode includes a frame shape carrier plate for holding a to-be-processed object, a loading chamber for inputting the to-be-processed object, a processing chamber, and an unloading chamber for outputting the finished object. The processing chamber has a first electrode, a second electrode, and a moving device controlling the second electrode to move between an electrically disconnected position and an electrically conducted position. When the second electrode is away from the first electrode and does not contact the to-be-processed object, the second electrode is at the electrically disconnected position. When the second electrode moves toward the first electrode to push the to-be-processed object to leave the frame shape carrier plate, the second electrode is at the electrically conducted position. The plasma electric field is prevented from being affected by particles on the carrier plate.
A continuous plasma processing system with adjustable electrode, comprising:
Dependencies are inferred from the claim text.