Multi-metal patterned anode for computed tomography X-ray systems
AssigneeNational Technology & Engineering Solutions of Sandia, LLC
InventorsCourtney Leigh Hummell Sovinec, Edward Steven Jimenez, Jr., Noelle Melissa Collins, Gabriella Dalton, Kyle R. Thompson, Amber Lynn Dagel
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Abstract
A multi-metal patterned anode for an X-ray detector is provided. The anode comprises a substrate and at least one group of disjointed circular features formed on the substrate, wherein the circular features are made from different metals. The circular features in different groups have different radii, and the circular features in the same group have the same radii. The groups of circular features are radially arrayed on the substrate. The substrate is made of diamond or beryllium.
Claims22
A multi-metal patterned anode for an X-ray detector, that comprises:
- a substrate;
- and
- a plurality of groups of three circular features radially aligned on the substrate, wherein the three circular features are each made from different metals from each other, and wherein radii of the three circular features decrease with increasing radial distance from a center of the substrate.
A multi-metal patterned anode for an X-ray detector, wherein the multi-metal patterned anode comprises:
- a substrate;
- and
- a plurality of groups each comprising three disjointed circular features formed on the substrate, the plurality of groups radially arrayed on the substrate, wherein each circular feature is made from a different metal, and wherein radii of the groups decrease with increasing radial distance from a center of the substrate.
An X-ray system, that comprises:
- a cathode configured to emit electrons;
- a multi-metal patterned anode configured to emit X-rays responsive to the electrons striking the anode, the multi-metal patterned anode comprises:
- a substrate;
- a plurality of groups of three disjointed circular features radially aligned on the substrate, wherein each circular feature is made from a different metal from each other, and wherein radii of the three disjointed circular features decrease with increasing radial distance from a center of the substrate;
- and
- a detector configured to detect the X-rays and generate corresponding electrical signals.
A method of fabricating a multi-metal patterned anode for an X-ray detector, the method comprising:
- applying a layer of photoresist material on a substrate;
- aligning a photomask with the substrate, wherein the photomask comprises a transparent substrate with at least one group of disjointed circular opaque regions corresponding to desired mask patterns;
- exposing the layer of photoresist material to ultraviolet (UV) light through the photomask using a photolithography process;
- developing the layer of photoresist material to remove either the exposed or unexposed areas of the layer of photoresist material;
- and
- depositing metal layers onto the desired mask patterns on the substrate using a deposition process to form a plurality of groups that comprise three circular features radially aligned on the substrate, wherein the circular features have different metal layers from each other and wherein radii of the three circular features decrease with increasing radial distance from a center of the substrate.
A patterned anode for an X-ray detector, wherein the patterned anode comprises:
- a substrate;
- and
- a plurality of groups radially aligned on the substrate, wherein each of the plurality of groups comprise three circular features, wherein each of the three circular comprises a different metal from each other, and wherein radii of the three circular features decrease with increasing radial distance from a center of the substrate.
Dependencies are inferred from the claim text.