Information processing apparatus, storage medium, and analysis method
AssigneeTokyo Electron Limited
InventorToshiyuki Fukumoto
Life of this patent
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Abstract
An information processing apparatus includes: a time-series data acquisition unit that acquires a plurality of time-series data pieces output from one or more substrate processing apparatuses; an analysis unit that analyzes similarity between the time-series data pieces acquired from the substrate processing apparatuses that are performing a processing according to the same sequence, by using dynamic time warping, thereby digitizing a difference between the time-series data pieces; and an output control unit that outputs an analysis result based on the difference between the time-series data pieces.
Claims10
An information processing apparatus comprising:
- a memory;
- and
- a processor coupled to the memory and configured to:
- acquire a plurality of time-series data pieces output from one or more substrate processing apparatuses, the plurality of time-series data pieces indicating a device state of the one or more substrate processing apparatuses;
- analyze similarity between the plurality of time-series data pieces acquired from the one or more substrate processing apparatuses that are performing a processing according to a same sequence, by using dynamic time warping, thereby digitizing a difference between the plurality of time-series data pieces;
- an output control circuitry configured to output information indicating at least one of the plurality of substrate processing apparatuses or a sensor for which the difference between the time-series data pieces exceeds a predetermined threshold value;
- and
- automatically determine, based on the output information, whether an abnormal individual difference or an abnormality of the device state has occurred in the one or more substrate processing apparatuses, and whether a maintenance of the one or more substrate processing apparatuses has been performed.
A non-transitory computer-readable storage medium having stored therein a program that, when executed, causes a computer to execute a process performed by an information processing apparatus, the process including:
- acquiring, by the computer, a plurality of time-series data pieces output from one or more substrate processing apparatuses, the plurality of time-series data pieces indicating a device state of the one or more substrate processing apparatuses;
- analyzing, by the computer, similarity between the plurality of time-series data pieces acquired from the one or more substrate processing apparatuses that are performing a processing according to a same sequence, by using dynamic time warping, thereby digitizing a difference between the time-series data pieces;
- outputting, by the computer, information indicating at least one of the plurality of substrate processing apparatuses or a sensor for which the difference between the time-series data pieces exceeds a predetermined threshold value;
- and
- automatically determining, by the computer and based on the output information, whether an abnormal individual difference or an abnormality of the device state has occurred in the one or more substrate processing apparatuses, and whether a maintenance of the one or more substrate processing apparatuses has been performed.
An analysis method comprising:
- providing a substrate processing system including one or more substrate processing apparatuses;
- and an information processing apparatus communicably connected to the substrate processing apparatuses,
- the information processing apparatus including a memory, and a processor coupled to the memory,
- acquiring, by the processor, a plurality of time-series data pieces output from the substrate processing apparatuses,
- analyzing, by the processor, similarity between the time-series data pieces acquired from the substrate processing apparatuses that are performing a processing according to the same sequence, by using dynamic time warping, thereby digitizing a difference between the time-series data pieces;
- outputting, by the processor, information indicating at least one of the plurality of substrate processing apparatuses or a sensor for which the difference between the time-series data pieces exceeds a predetermined threshold value;
- and
- automatically determining, by the processor and based on the output information, whether an abnormal individual difference or an abnormality of the device state has occurred in the one or more substrate processing apparatuses, and whether a maintenance of the one or more substrate processing apparatuses has been performed.
Dependencies are inferred from the claim text.