Reticle pod provided with reticle support for absorbing downward pressure

A reticle pod, comprising a base and a plurality of at least one reticle supports disposed on the base, characterized in that:

• each of the reticle supports is for carrying a reticle and has a resilient means;
• wherein, when a downward pressure applied to one of the reticle supports is less than or equal to a critical value, a height of the one of the reticle supports is maintained at a predetermined height;
• wherein, when the downward pressure applied to one of the reticle supports is greater than the critical value, the one of the reticle supports absorbs the downward pressure by self-compressive deforming, and then the one of the reticle supports restores to the predetermined height only when the downward pressure is shared by another reticle support.