Laser radar
AssigneesNikon Metrology NV, Nikon Corporation
InventorsAnthony Slotwinski, Ghassan Chamsine, Tom Hedges, Paul Lightowler, Daniel Gene Smith, Yasuhiro Hidaka, Masanori Arai
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AssigneesNikon Metrology NV, Nikon Corporation
InventorsAnthony Slotwinski, Ghassan Chamsine, Tom Hedges, Paul Lightowler, Daniel Gene Smith, Yasuhiro Hidaka, Masanori Arai
Estimating the term…
Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.
An apparatus, comprising:
Dependencies are inferred from the claim text.