# US 12,644,970 B2 · Coherent pulsed lidar system with two-sided detector

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- Number: US 12,644,970 B2
- Document ID: US12644970B2
- Status: Granted
- Kind: B2
- Application number: 17/723,996
- Filed: 2022-04-19
- Published: 2022-10-20
- Granted: 2026-06-02
- Earliest claimed: 2021-04-20
- Assignees: Microvision, Inc.
- Applicants: Luminar Technologies, Inc.
- Inventors: Lawrence Shah; Alex Michael Sincore; Roger S. Cannon; Joseph G. LaChapelle; Stephen D. Gaalema; Jason M. Eichenholz
- Web page: https://patentgrep.com/patent/US12644970B2

## CPC

- G01S 7/4863: Detector arrays, e.g. charge-transfer gates
- G01S 7/4817: {relating to scanning}
- G01S 7/4818: {using optical fibres}
- G01S 7/484: Transmitters
- G01S 7/4865: Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak (peak detection in noise, signal conditioning G01S7/487)
- G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32)
- G01S 17/26: wherein the transmitted pulses use a frequency-modulated or phase-modulated carrier wave, e.g. for pulse compression of received signals
- G01S 17/894: Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar
- H10F 30/222: the potential barrier being a PN heterojunction
- H10F 30/223: the potential barrier being a PIN barrier
- H10F 30/225: the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- B62D 15/025: {Active steering aids, e.g. helping the driver by actively influencing the steering system after environment evaluation (B62D1/28 takes precedence)}
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- B62D: MOTOR VEHICLES; TRAILERS (steering, or guiding on a desired track, of agricultural machines or implements A01B69/00; wheels, castors, axles, increasing wheel adhesion B60B; vehicle tyres, tyre inflation or tyre changing B60C; connections between vehicles of a train or the like B60D; vehicles for use on rail and road, amphibious or convertible vehicles B60F; suspension arrangements B60G; heating, cooling, ventilating or other air treating devices B60H; windows, windscreens, non-fixed roofs, doors or similar devices, protective coverings for vehicles not in use B60J; propulsion plant arrangements, auxiliary drives, transmissions, controls, instrumentation or dashboards B60K; electric equipment or propulsion of electrically-propelled vehicles B60L; power supply for electrically-propelled vehicles B60M; passenger accommodation not otherwise provided for B60N; adaptations for load transportation or to carry special loads or objects B60P; arrangement of signalling or lighting devices, the mounting or supporting thereof or circuits therefor, for vehicles in general B60Q; vehicles, vehicle fittings or vehicle parts not otherwise provided for B60R; servicing, cleaning, repairing, supporting, lifting, or manoeuvring, not otherwise provided for, B60S; brake arrangements, brake control systems or parts thereof B60T; air-cushion vehicles B60V; motor-cycles, accessories therefor B62J, B62K; testing of vehicles G01M)

## Abstract

In one embodiment, a lidar system includes a light source configured to emit (i) local-oscillator light and (ii) pulses of light. The lidar system also includes a receiver configured to detect the local-oscillator light and a received pulse of light, the received pulse of light including a portion of one of the emitted pulses of light scattered by a target located a distance from the lidar system. The receiver includes a detector configured to produce a photocurrent signal corresponding to a coherent mixing of the local-oscillator light and the received pulse of light. The detector includes a first input side and a second input side located opposite the first input side, where the received pulse of light is incident on the first input side of the detector, and the local-oscillator light is incident on the second input side of the detector.

## Claims

### Claim 1

A lidar system comprising:
a light source configured to emit (i) local-oscillator light and (ii) pulses of light;
a receiver configured to detect the local-oscillator light and a received pulse of light, the received pulse of light comprising a portion of one of the emitted pulses of light scattered by a target located a distance from the lidar system, wherein the receiver comprises:
a detector configured to produce a photocurrent signal corresponding to a coherent mixing of the local-oscillator light and the received pulse of light, wherein the detector comprises a first input side and a second input side located opposite the first input side, wherein the received pulse of light is incident on the first input side of the detector, and the local-oscillator light is incident on the second input side of the detector, wherein the detector is a multi-element detector comprising a plurality of active regions distributed along a propagation axis of the local-oscillator light, wherein each active region is configured to produce at least a portion of the photocurrent signal, wherein the active regions comprise a first set of active regions and a second set of active regions, wherein the first and second sets of active regions are interleaved, wherein one active region of the second set is located between each pair of adjacent active regions of the first set, and wherein the photocurrent signal comprises a first portion and a second portion, wherein the first portion of the photocurrent signal is produced by the first set of active regions, and the second portion of the photocurrent signal is produced by the second set of active regions; and
a pulse-detection circuit configured to determine, based at least in part on the photocurrent signal, a time-of-arrival for the received pulse of light; and
a processor configured to determine the distance from the lidar system to the target based at least in part on the time-of-arrival for the received pulse of light.

### Claim 2 (depends on 1)

The lidar system of claim 1, wherein the first input side of the detector comprises an anti-reflection coating configured to reduce a reflectivity of the first input side at a wavelength of the received pulse of light.

### Claim 3 (depends on 1)

The lidar system of claim 1, wherein the second input side of the detector comprises an anti-reflection coating configured to reduce a reflectivity of the second input side at a wavelength of the local-oscillator light.

### Claim 4 (depends on 1)

The lidar system of claim 1, wherein the second input side of the detector comprises a partial-reflectivity coating configured to provide a reflectivity between 10% and 99% at a wavelength of the local-oscillator light.

### Claim 5 (depends on 1)

The lidar system of claim 1, wherein the detector is attached to an electronic circuit comprising a substrate material that is substantially transparent to light at a wavelength of the received pulse of light or the local-oscillator light; and
the received pulse of light or the local-oscillator light travels through the substrate material to reach the detector.

### Claim 6 (depends on 5)

The lidar system of claim 5, wherein a surface of the substrate material opposite the detector comprises an anti-reflection coating configured to reduce a reflectivity of the surface at the wavelength of the received pulse of light or the local-oscillator light.

### Claim 7 (depends on 5)

The lidar system of claim 5, wherein the electronic circuit is substantially free of opaque material along a path that the received pulse of light or the local-oscillator light travels to reach the detector.

### Claim 8 (depends on 5)

The lidar system of claim 5, wherein:
the electronic circuit comprises an electronic amplifier configured to amplify the photocurrent signal to produce a voltage signal that corresponds to the photocurrent signal; and
the pulse-detection circuit is part of the electronic circuit and is configured to receive the voltage signal from the electronic amplifier and determine the time-of-arrival for the received pulse of light based at least in part on the voltage signal.

### Claim 9 (depends on 1)

The lidar system of claim 1, wherein the detector is attached to an electronic circuit that comprises an opening through which the received pulse of light or the local-oscillator light travels to reach the detector.

### Claim 10 (depends on 1)

The lidar system of claim 1, wherein the detector is attached to an electronic circuit, wherein the detector is oriented approximately perpendicular to a surface of the electronic circuit, wherein each of the local-oscillator light and the received pulse of light propagates approximately parallel to the surface of the electronic circuit.

### Claim 11 (depends on 1)

The lidar system of claim 1, wherein the detector is a multi-element detector comprising a one-dimensional or two-dimensional array of a plurality of detector elements, the detector elements distributed along an axis or a plane approximately perpendicular to a propagation axis of the local-oscillator light.

### Claim 12 (depends on 1)

The lidar system of claim 1, wherein the photocurrent signal comprises a first portion and a second portion, wherein:
the first portion of the photocurrent signal is produced by direct detection of the received pulse of light; and
the second portion of the photocurrent signal is produced by coherent mixing of the local-oscillator light and a portion of the received pulse of light that is reflected from a surface of the receiver, wherein the reflected portion of the received pulse of light co-propagates with the local-oscillator light from the second input side towards the first input side.

### Claim 13 (depends on 1)

The lidar system of claim 1, wherein the active regions of each set of active regions are spaced apart from one another along the propagation axis by a distance of, (N+1/2)·λ, wherein N is an integer greater than or equal to zero, and λ is a wavelength of the received pulse of light or the local-oscillator light within the detector.

### Claim 14 (depends on 1)

The lidar system of claim 1, wherein the detector is a multi-element detector comprising a plurality of active regions distributed along a propagation axis of the local-oscillator light, wherein each active region is configured to produce at least a portion of the photocurrent signal.

### Claim 15 (depends on 14)

The lidar system of claim 14, wherein the first and second input sides of the detector each comprises an anti-reflection coating.

### Claim 16 (depends on 14)

The lidar system of claim 14, wherein the photocurrent signal is produced by coherent mixing of the local-oscillator light and the received pulse of light, wherein, during the coherent mixing, the local-oscillator light and the received pulse of light propagate in opposite directions within the detector.

### Claim 17 (depends on 14)

The lidar system of claim 14, wherein each active region comprises an absorption region configured to absorb at least a portion of the received pulse of light to produce electronic carriers, wherein a thickness of each absorption region is less than λ/2, wherein λ is a wavelength of the received pulse of light or the local-oscillator light within the detector.

### Claim 18 (depends on 1)

The lidar system of claim 1, wherein:
the detector is a first detector;
the photocurrent signal is a first photocurrent signal;
the receiver further comprises a second detector located adjacent to the first detector, the second detector configured to produce a second photocurrent signal corresponding to another coherent mixing of the local-oscillator light and the received pulse of light;
the first and second detectors are each configured to receive a respective first and second portion of the local-oscillator light; and
the second detector comprises an optical phase shift element configured to apply a phase shift to the second portion of the local-oscillator light with respect to the first portion of the local-oscillator light.

### Claim 19 (depends on 18)

The lidar system of claim 18, wherein the phase shift is (2M+1)·π radians, wherein M is an integer greater than or equal to zero.

### Claim 20 (depends on 18)

The lidar system of claim 18, wherein the active regions of each detector are spaced apart from one another along the propagation axis by a distance of (N+1/2)·λ, wherein N is an integer greater than or equal to zero, and λ is a wavelength of the received pulse of light or the local-oscillator light within the detector.

### Claim 21 (depends on 1)

The lidar system of claim 1, wherein the receiver further comprises a lens configured to focus the local-oscillator light onto the detector so that the focused local-oscillator light has a particular wavefront curvature at the detector.

### Claim 22 (depends on 1)

The lidar system of claim 1, wherein:
the detector is a multi-element detector comprising a one-dimensional array of a plurality of detector elements distributed along an axis approximately perpendicular to a propagation axis of the local-oscillator light; and
the receiver further comprises a plurality of lenses, each lens configured to focus a portion of the local-oscillator light onto one or more of the detector elements so that each focused portion of the local-oscillator light has a particular wavefront curvature that is approximately equal to a wavefront curvature of scattered light received from a target located a particular distance from the lidar system.

### Claim 23 (depends on 1)

The lidar system of claim 1, wherein
the receiver further comprises a metalens configured to produce a plurality of portions of the local-oscillator light, wherein each portion of the local-oscillator light is focused onto one or more of the active regions so that each focused portion of the local-oscillator light has a particular wavefront curvature.

### Claim 24 (depends on 23)

The lidar system of claim 23, wherein the metalens is further configured to produce the portions of the local-oscillator light so that each focused portion has a particular optical power or intensity.

### Claim 25 (depends on 1)

The lidar system of claim 1, wherein:
each emitted pulse of light is coherent with a corresponding temporal portion of the local-oscillator light; and
the local-oscillator light and the received pulse of light are coherently mixed together at the detector to produce the photocurrent signal.

### Claim 26 (depends on 1)

The lidar system of claim 1, wherein the detector comprises an active region and a detector substrate located adjacent to the active region, wherein:
the active region is configured to produce the photocurrent signal;
the detector substrate is substantially transparent to light at a wavelength of the received pulse of light or the local-oscillator light; and
the received pulse of light or the local-oscillator light travels through the detector substrate to reach the active region.

### Claim 27 (depends on 1)

The lidar system of claim 1, wherein the detector is an avalanche photodiode (APD).

### Claim 28 (depends on 1)

The lidar system of claim 1, wherein the detector is a PN or PIN photodiode.

### Claim 29 (depends on 1)

The lidar system of claim 1, wherein the photocurrent signal comprises a sum of a first term, a second term, and a third term, wherein (i) the first term corresponds to an optical property of the received pulse of light, (ii) the second term corresponds to the coherent mixing of the local-oscillator light and the received pulse of light, and (iii) the third term corresponds to an optical property of the local-oscillator light.

### Claim 30 (depends on 29)

The lidar system of claim 29, wherein:
the optical property of the received pulse of light is an optical power, optical intensity, optical energy, or electric field of the received pulse of light; and
the optical property of the local-oscillator light is an optical power, optical intensity, optical energy, or electric field of the local-oscillator light.

### Claim 31 (depends on 29)

The lidar system of claim 29, wherein the second term is a coherent-mixing term that is proportional to a product of (i) an amplitude of an electric field of the received pulse of light and
(ii) an amplitude of an electric field of the local-oscillator light.

### Claim 32 (depends on 29)

The lidar system of claim 29, wherein the photocurrent signal is proportional to |εRx(t)+εLO(t)|2, wherein:
εRx(t) represents an electric field of the received pulse of light; and
εLO(t) represents an electric field of the local-oscillator light.

### Claim 33 (depends on 32)

The lidar system of claim 32, wherein:
the first term corresponds to an optical power of the received pulse of light and is represented by |εRx(t)|2;
the second term, which corresponds to the coherent mixing of the local-oscillator light and the received pulse of light, is represented by 2·|εRx(t)|·|εLO(t)|2·cos [Δω(t) t−(kRx−kLO)·Z+Δφ(t)], wherein:
Δω(t) represents a frequency difference between the electric field of the received pulse of light and the electric field of the local-oscillator light;
kRx represents a wavenumber of the received pulse of light;
kLo represents a wavenumber of the local-oscillator light;
z represents a position along a propagation axis within the detector; and
Δφ(t) represents a phase difference between the electric field of the received pulse of light and the electric field of the local-oscillator light; and
the third term corresponds to an optical power of the local-oscillator light and is represented by |εLO(t)|2.

### Claim 34 (depends on 1)

The lidar system of claim 1, wherein the light source comprises:
a seed laser diode configured to produce a seed optical signal and the local-oscillator light; and
a semiconductor optical amplifier (SOA) configured to amplify temporal portions of the seed optical signal to produce the emitted pulses of light, wherein each amplified temporal portion of the seed optical signal corresponds to one of the emitted pulses of light.

### Claim 35 (depends on 34)

The lidar system of claim 34, wherein the light source further comprises an electronic driver configured to:
supply a substantially constant electrical current to the seed laser diode so that the seed optical signal comprises light having a substantially constant optical power; and
supply pulses of electrical current to the SOA, wherein each pulse of current causes the SOA to amplify one of the temporal portions of the seed optical signal to produce one of the emitted pulses of light.

### Claim 36 (depends on 1)

The lidar system of claim 1, wherein the light source comprises:
a seed laser diode configured to produce a seed optical signal and the local-oscillator light;
a semiconductor optical amplifier (SOA) configured to amplify temporal portions of the seed optical signal to produce initial pulses of light; and
a fiber-optic amplifier configured to receive the initial pulses of light from the SOA and further amplify the initial pulses of light to produce the emitted pulses of light, wherein each amplified temporal portion of the seed optical signal corresponds to one of the emitted pulses of light.

### Claim 37 (depends on 1)

The lidar system of claim 1, wherein the light source comprises:
a seed laser diode configured to produce a seed optical signal;
an optical amplifier configured to amplify temporal portions of the seed optical signal to produce the emitted pulses of light; and
a local-oscillator laser diode configured to produce the local-oscillator light, wherein the seed laser diode and the local-oscillator laser diode are frequency locked to one another.

### Claim 38 (depends on 1)

The lidar system of claim 1, further comprising a photonic integrated circuit (PIC) comprising one or more optical waveguides, wherein:
the detector is attached to, connected to, or integrated with the PIC;
one of the optical waveguides is configured to convey the received pulse of light to the first input side of the detector; and
another of the optical waveguides is configured to convey the local-oscillator light to the second input side of the detector.

### Claim 39 (depends on 1)

The lidar system of claim 1, further comprising an optical polarization element configured to alter a polarization of the emitted pulses of light, the local-oscillator light, or the received pulse of light to allow the local-oscillator light and the received pulse of light to be coherently mixed.

### Claim 40 (depends on 39)

The lidar system of claim 39, wherein the optical polarization element comprises (i) a quarter-wave plate configured to convert the polarization of the local-oscillator light to circularly or elliptically polarized light or (ii) a depolarizer configured to depolarize the polarization of the local-oscillator light.