Circuit for detecting defects

A circuit for detecting defects, the circuit comprising:

• a semiconductor die comprising a first region and a second region;
• a first defect detection conductor provided in a peripheral region of the first region;
• a second defect detection conductor provided in a peripheral region of the second region;
• an input pad connected to a first end of the first defect detection conductor and a first end of the second defect detection conductor;
• an output pad connected to a second end of the first defect detection conductor and a second end of the second defect detection conductor;
• a first defect detection assembly connected to the first defect detection conductor and configured to detect a defect of the first defect detection conductor;
• a second defect detection assembly connected to the second defect detection conductor and configured to detect a defect of the second defect detection conductor;
• and
• a controller configured to control the first defect detection assembly and the second defect detection assembly,
• wherein the first defect detection assembly comprises a first reference voltage supply, a first reference capacitor, a first switching assembly, and a plurality of first detection capacitors,
• wherein the first switching assembly is configured to connect the first reference capacitor to one of the first reference voltage supply, a position adjacent to the input pad of the first defect detection conductor, and a position adjacent to the output pad of the first defect detection conductor,
• wherein the second defect detection assembly comprises a second reference voltage supply, a second reference capacitor, a second switching assembly, and a plurality of second detection capacitors, and
• wherein the second switching assembly is configured to connect the second reference capacitor to one of the second reference voltage supply, a position adjacent to the output pad of the second defect detection conductor, and a position adjacent to the output pad of the second defect detection conductor.

A circuit for detecting defects, the circuit comprising:

• a defect detection conductor provided on a peripheral region of a semiconductor die;
• an input pad connected to a first end of the defect detection conductor;
• an output pad connected to a second end of the defect detection conductor;
• a defect detection assembly connected to the defect detection conductor and configured to detect a defect of the defect detection conductor;
• and
• a controller configured to control operations of the defect detection assembly,
• wherein the defect detection assembly comprises a reference voltage supply, a reference capacitor, a switching assembly,
• wherein a plurality of detection capacitors are connected to the defect detection conductor in parallel,
• wherein the switching assembly comprises:
• a first switch configured to connect the reference capacitor to the reference voltage supply;
• and
• a second switch configured to connect the reference capacitor to a position adjacent to the input pad of the defect detection conductor,
• wherein, based on the first switch being turned on and the second switch being turned off, the controller is configured to control the reference voltage supply to charge the reference capacitor, and
• wherein, based on the first switch being turned off and the second switch being turned on, the controller is configured to measure a voltage between the reference capacitor and at least one of the plurality of detection capacitors.