Pressure sensor module and dispensing device having a distortion detection unit
AssigneeHitachi High-Tech Corporation
InventorsMasatoshi Kanamaru, Takanori Aono, Tatsuya Yamasaki, Yoichiro Suzuki
Life of this patent
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Abstract
A pressure sensor module and a dispensing apparatus improving accuracy of pressure measurement are provided. A pressure sensor module includes: a flow channel substrate in which a flow channel and a branch channel are formed; and a distortion detection unit configured to detect a pressure. The branch channel is branched from the flow channel and is connected to the distortion detection unit at one end of the branch channel. The distortion detection unit is disposed at least partially via a bond layer to block the one end of the branch channel. A protrusion is provided to surround the one end of the branch channel.
Claims12
A pressure sensor module comprising:
- a flow channel substrate in which a flow channel and a branch channel are formed;
- and
- a distortion detection unit configured to detect a pressure,
- wherein the branch channel is branched from the flow channel and is connected to the distortion detection unit at one end of the branch channel,
- wherein the distortion detection unit is disposed at least partially via a bond layer to block the one end of the branch channel,
- wherein a protrusion is provided to surround the one end of the branch channel, and
- an inside dimension of the protrusion is greater than an inside dimension of the branch channel,
- wherein the bond layer is configured to bond the distortion detection unit and the flow channel substrate, and
- wherein the bond layer is disposed so as to surround a circumference of the protrusion and is disposed at a position where the bond layer does not enter a region communicating with the branch channel surrounded by the protrusion so as not to be in contact with the region.
Dependencies are inferred from the claim text.