Spectroscopic device
AssigneeHamamatsu Photonics K.K.
InventorsMakoto Nozaki, Naoto Sakurai, Norihiro Iwasaki
Life of this patent
Estimating the term…
Loading patent…
AssigneeHamamatsu Photonics K.K.
InventorsMakoto Nozaki, Naoto Sakurai, Norihiro Iwasaki
Estimating the term…
A spectroscopic device includes a swing element having a swing surface, a diffraction grating configured to disperse measurement light reflected by the swing surface, a first light detection unit including a first light detector that detects a part of the measurement light dispersed by the diffraction grating, a light source configured to emit inspection light, and a second light detection unit including a second light detector configured to detect the inspection light reflected by the swing surface. The swing element includes a support portion, a movable portion having the swing surface, and a coupling portion coupling the support portion and the movable portion such that a swing angle of the swing surface changes with a predetermined axis as a center line. The second light detection unit has an elongated light receiving region in which a moving direction of the inspection light is a longitudinal direction.
A spectroscopic device comprising:
Dependencies are inferred from the claim text.