Composition, precursor composition including same, and method of manufacturing thin film using same precursor composition
AssigneeHansol Chemical Co., Ltd.
InventorsKyu-Hyun Yeom, Ki-Yeung Mun, Dae-Won Ryu, Jang-Hyeon Seok
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Abstract
Proposed is a vapor deposition precursor composition that enables thin film deposition through vapor deposition. Specifically, proposed is a novel composition applicable to atomic layer deposition (ALD) or chemical vapor deposition (CVD), in which the novel composition having excellent reactivity, volatility, and thermal stability, a precursor composition containing the novel composition. Additionally, a method of manufacturing a thin film using the precursor composition is proposed.
Claims9
A composition comprising a first compound represented by Formula 1 below and a second compound represented by Formula 2 below:
- wherein the molar ratio of the first compound to the second compound comprised in the composition is in a range of 1:1 to 5:1,
- wherein in Formula 1, R1 and R2 are each independently hydrogen, a linear or a branched hydrocarbon group having 1 to 4 carbon atoms, OR10, or NR11R12;
- R3, R8, and R9 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 6 carbon atoms;
- R4 to R7 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 3 carbon atoms;
- and
- R10 to R12 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 3 carbon atoms,
- wherein in Formula 2, R13 and R14 are each independently hydrogen, a linear or a branched hydrocarbon group having 1 to 4 carbon atoms, OR22, or NR23R24;
- R15, R20, and R21 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 6 carbon atoms;
- R16 to R19 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 3 carbon atoms;
- and
- R22 to R24 are each independently hydrogen or a linear or a branched hydrocarbon group having 1 to 3 carbon atoms.
Dependencies are inferred from the claim text.