Pressure sensor, glass wafer and production method

Abstract

A glass article is provided that has two plane-parallel main sides, a thickness between the two plane-parallel main sides of less than 3.0 mm, an average near-surface level of damage (ONSL) on each of the two plane-parallel main sides, and an average location-thickness variation (ODS) normalized with respect to the thickness on the specified measuring area. The average near-surface level of damage is less than 2000 damages with an extension of less than 1.0 μm. The specified measuring area is 2×2 mm2. The average location-thickness variation (ODS) normalized is less than 10 nm per μm thickness of the glass article. The average location-thickness variation (ODS) is a difference between a highest thickness and a lowest thickness within the specified measuring area.

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