Manipulator for rotary-linear motion in vacuum
AssigneeApplied Materials Israel Ltd.
InventorAsaf Gutman
Life of this patent
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Abstract
A manipulator that includes a vacuum chamber interface that is configured to be detachably coupled to a vacuum chamber, a shaft, a proximal enclosure, a proximal housing, a distal housing, a rotational movement unit configured to translate a rotational movement of the distal housing to a rotational movement of the shaft, a linear movement unit configured to translate a linear movement of the distal housing to a linear movement of the shaft and of the proximal enclosure, a rotational movement bellows configured to maintain a vacuum environment around the shaft during the rotational movement of the shaft, and a linear movement bellows configured to maintain the vacuum environment around the shaft during the linear movement of the shaft.
Claims11
A manipulator, comprising:
- a vacuum chamber interface that is configured to be detachably coupled to a vacuum chamber;
- a shaft;
- a proximal enclosure that surrounds a proximal portion of the shaft;
- wherein the shaft, when positioned at a proximal position, extends through the vacuum chamber interface;
- a proximal housing that surrounds the proximal enclosure;
- a distal housing;
- a rotational movement unit configured to transfer a rotational movement of the distal housing to a rotational movement of the shaft;
- a linear movement unit configured to transfer a linear movement of the distal housing to a linear movement of the shaft;
- a rotational movement bellows configured to maintain a vacuum environment around the shaft during the rotational movement of the shaft;
- and
- a linear movement bellows configured to maintain the vacuum environment around the shaft during the linear movement of the shaft.
Dependencies are inferred from the claim text.