Method for providing a workpiece support unit for supporting a workpiece

A method of providing a workpiece support unit for supporting a workpiece, the method comprising:

• providing a carrier substrate having a first side and a second side opposite to the first side;
• providing a protective sheeting;
• providing an intermediate layer;
• and
• arranging the protective sheeting and the intermediate layer on the first side of the carrier substrate by partially interposing the intermediate layer between the protective sheeting and the carrier substrate so that an attachment force between said protective sheeting and said carrier substrate is greater in a peripheral region of the first side of the carrier substrate than in a center region of the first side of the carrier substrate,
• wherein the intermediate layer is arranged in direct contact with the carrier substrate in the center region of the first side of the carrier substrate, and
• wherein the intermediate layer is arranged in direct contact with said protective sheeting.