Alignment adjuster and method for manufacturing electronic devices

An alignment adjuster comprising:

• a first holder made of a first material and configured to support an optical element;
• a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting a length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder;
• a first support member made of the second material and configured to support the first adjuster;
• a second holder made of the first material and configured to support the first holder at the first axis and further support the first support member at a first end section of the first support member;
• a second adjuster including a second expandable/contractable section made of the second material and configured to rotate the second holder, the first holder, and the optical element around a second axis that intersects with the first axis by adjusting a length of the second expandable/contractable section with the second expandable/contractable section being in contact with the second holder;
• and
• a second support member made of the second material and configured to support the second adjuster,
• the first end section being located in a fifth plane containing the first axis and the second axis.

A method for manufacturing electronic devices, the method comprising:

• generating pulse laser light by using a laser apparatus,
• outputting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture the electronic devices,
• the laser apparatus including an alignment adjuster including
• a first holder made of a first material and configured to support an optical element,
• a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting a length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder, and
• a first support member made of the second material and configured to support the first adjuster, and
• the first adjuster being configured to be capable of adjusting a position where the first expandable/contractable section and the first holder are in contact with each other to be located in a first plane containing a first end section of the first support member and the first axis.