Package substrate with embedded device, and manufacturing method therefor
AssigneeZhuhai ACCESS Semiconductor Co., Ltd.
InventorsXianming Chen, Wenjian Lin, Benxia Huang, Gao Huang
Life of this patent
Estimating the term…
Loading patent…
AssigneeZhuhai ACCESS Semiconductor Co., Ltd.
InventorsXianming Chen, Wenjian Lin, Benxia Huang, Gao Huang
Estimating the term…
A package substrate with an embedded device and a manufacturing method therefor are disclosed. The method includes: manufacturing a third circuit layer and a target on a temporary carrier plate, and laminating a third dielectric layer; placing a device to be embedded on the third dielectric layer which is then covered with a second dielectric layer; laminating a second copper foil and manufacturing a second circuit layer, a second copper pillar, and a third copper pillar; laminating a first dielectric layer and a first copper foil sequentially, and removing the temporary carrier plate; laminating a fourth dielectric layer on the third circuit layer; laminating a fourth copper foil on the fourth dielectric layer; and manufacturing a fourth circuit layer and a fourth copper pillar through the fourth copper foil, and manufacturing a first circuit layer and a first copper pillar through the first copper foil.
A manufacturing method for a package substrate with an embedded device, comprising:
Dependencies are inferred from the claim text.