Semiconductor post-process impact detection device, semiconductor post-process transportation system including same, and impact location tracking method using same

A semiconductor post-process transportation system comprising:

• a distribution line;
• a transportation device moving along the distribution line and transporting a substrate;
• and
• an impact detection device moving along the distribution line,
• wherein the impact detection device includes:
• a detection body that moves along the distribution line;
• a vibration detection unit coupled to the detection body, the vibration detection unit detects vibration of the detection body;
• a rotation detection unit coupled to the detection body, the rotation detection unit detecting rotation of the detection body;
• an internal power supply coupled to the detection body;
• and
• a controller processing signals of the vibration detection unit and the rotation detection unit,
• wherein the controller is configured to determine information concerning the detection body based on a distribution map of the distribution line,
• wherein the distribution line includes a predetermined movement direction, a vertical step, and a rotation node configured to transport the detection body and a transportation device,
• wherein the transportation device includes a transportation body supporting the substrate,
• wherein the transportation body and the detection body have a same shape as each other, and
• wherein a weight of the transportation device and a weight of the impact detection device are equal to each other.

An impact location tracking method comprising:

• measuring a rotating angular velocity by a rotation detection unit of an impact detection device on a semiconductor post-process distribution line;
• and
• determining a rotation direction when the rotating angular velocity is greater than or equal to a threshold rotating angular velocity stored in a controller of the impact detection device,
• wherein the impact detection device includes:
• a detection body;
• the rotation detection unit coupled to the detection body, the rotation detection unit detects rotation of the detection body;
• an internal power supply coupled to the detection body;
• the controller processes a signal of the rotation detection unit to determine information concerning the detection body, the controller transmitting the information concerning the detection body to a data transmission unit;
• and
• the data transmission unit transmitting the information concerning the detection body provided from the controller to a data display unit;
• and
• the determining of the rotation direction of the impact detection device includes:
• measuring a direction change information of a node of a distribution map;
• and
• matching the direction change information of the node and the rotating angular velocity of the impact detection device with each other,
• wherein the semiconductor post-process distribution line includes a predetermined movement direction, a vertical step, and a rotation node configured to transport the detection body and a transportation device configured to transport a substrate,
• wherein the transportation device includes a transportation body supporting the substrate,
• wherein the transportation body and the detection body have a same shape as each other, and
• wherein a weight of the transportation device and a weight of the impact detection device are equal to each other.