Resonator device
AssigneeSeiko Epson Corporation
InventorsRyuta Nishizawa, Junichi Takeuchi
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Abstract
A resonator device includes: a resonator element; a heat generating unit; a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base; and a high emissivity layer that is disposed at a surface of the heat generating unit on a first lid side and that has an emissivity higher than an emissivity of the surface. In addition, a constituent material of the surface is silicon, and the emissivity of the high emissivity layer at room temperature is 0.5 or more.
Claims10
A resonator device comprising:
- a resonator element;
- a heat generating unit;
- a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base;
- and
- a high emissivity layer that is disposed at a surface of the heat generating unit on a first lid side and that has an emissivity higher than an emissivity of the surface,
- wherein a constituent material of the surface is silicon.
A resonator device comprising:
- a resonator element;
- a heat generating unit;
- a first package including a first base at which the resonator element is disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base;
- a second package including a second base at which the first package is disposed via the heat generating unit, and a second lid bonded to the second base so as to accommodate the first package and the heat generating unit between the second lid and the second base;
- and
- a high emissivity layer that is disposed at a surface of the heat generating unit on a first package side and that has an emissivity higher than an emissivity of the surface,
- wherein a constituent material of the surface is silicon.
Dependencies are inferred from the claim text.