Display device and method of providing the same

A method of providing a display device, the method comprising:

• providing a first active pattern of a first transistor, the first active pattern including a first oxide semiconductor material;
• providing a first preliminary gate insulating film on the first active pattern;
• providing an oxide semiconductor film including a second oxide semiconductor material different from the first oxide semiconductor material, on the first preliminary gate insulating film;
• providing a second preliminary gate insulating film on the oxide semiconductor film;
• providing a first gate insulating pattern from the second preliminary gate insulating film, by removing a portion of the second preliminary gate insulating film;
• wherein the removing of the portion of the second preliminary gate insulating film exposes the oxide semiconductor film from the first gate insulating pattern to define an exposed portion of the oxide semiconductor film;
• providing a second active pattern of a second transistor by removing the exposed portion of the oxide semiconductor film;
• providing a preliminary gate electrode film along each of the first preliminary gate insulating film, the first gate insulating pattern and the second active pattern;
• providing a first gate electrode of the first transistor which is on the first active pattern, and a second gate electrode of the second transistor which is on the second active pattern, by removing a portion of the preliminary gate electrode film;
• and
• providing from the first preliminary gate insulating film:
• a second gate insulating pattern which faces the first gate insulating pattern with the second active pattern therebetween, and
• a third gate insulating pattern between the first active pattern and the first gate electrode, by removing a portion of the first preliminary gate insulating film.