Super-β bipolar junction transistor and manufacturing method therefor

Abstract

A manufacturing method for a super-β bipolar junction transistor includes providing a substrate, and forming a first conductive type isolation buried layer and a first conductive type doped layer based on the substrate. The isolation buried layer is located at a bottom of the doped layer. The method also includes forming a second conductive type base region in the doped layer and forming a second conductive type doped island on a peripheral side of the base region. A doping concentration of the doped island is greater than that of the base region. Additionally, the method includes forming a first conductive type collector region in the doped layer, and the collector region is spaced from the base region. Further, the method includes forming a first conductive type emitter region in the base region.

Dependencies are inferred from the claim text.