Plasma device for treating exhaust gas
AssigneePlasma Science System Co., Ltd.
InventorJong Pil Yoon
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Abstract
The present inventive concept relates to a device for treating an exhaust gas, and more particularly, to a plasma device capable of, even when connected to a vacuum pump, extending a lifetime of an electrode of a plasma torch. In the plasma device according to the present inventive concept, since an orifice is installed in a connection unit for connection with a vacuum pump to prevent a decrease in pressure of the vacuum pump, a pressure of a plasma reaction unit including the plasma torch of the plasma device can be maintained similar to normal pressure, thereby reducing the wear of a tungsten electrode in the plasma torch to extend a lifetime of the electrode.
Claims10
A plasma device for treating an exhaust gas, which is connected to a vacuum pump, the plasma device comprising:
- a plasma reaction unit which includes a plasma torch generating a plasma, an exhaust gas injection part provided under the plasma torch and provided with the exhaust gas, a reaction chamber provided under the exhaust gas injection part and in which a decomposed gas is generated by reaction between the exhaust gas and the plasma, and a coolant chamber provided to supply a coolant to the plasma torch and the reaction chamber;
- a cooling unit which is formed under and communicates with the plasma reaction unit and includes a passage and a coolant chamber configured to surround the passage, and to cool the decomposed gas;
- and
- a connection unit configured to connect the cooling unit and a vacuum pump,
- wherein an orifice is provided in the connection unit to prevent a pressure drop due to the vacuum pump,
- wherein the orifice has orifice body that is arranged in the direction of the vacuum pump to block flow of the decomposed gas, and an orifice pipe protrudes from the orifice body in the direction of the cooling unit, with a hole formed at the center of the orifice pipe,
- wherein the hole penetrates the orifice body and the decomposed gas is supplied to the vacuum pump.
Dependencies are inferred from the claim text.