Method for generating extreme ultraviolet light, extreme ultraviolet light source assembly and optical system
AssigneeShanghai Startorus Fusion Technology Company Limited
InventorsYi Tan, Rui Chen
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Abstract
A method for generating an extreme ultraviolet light, an extreme ultraviolet light source assembly, and an optical system are provided. With the method for generating an extreme ultraviolet light, a plasma is generated by a magnetic confinement device, if the plasma meets a preset injection condition, a heavy metal injection device is controlled to inject a designated heavy metal into the magnetic confinement device, so that the designated heavy metal interacts with the plasma in the magnetic confinement device to generate an extreme ultraviolet light, and an optical device is controlled to collect the extreme ultraviolet light.
Claims15
A method for generating an extreme ultraviolet light, the method comprising:
- generating a plasma by a magnetic confinement device;
- controlling, if the plasma meets a preset injection condition, a heavy metal injection device to inject a designated heavy metal into the magnetic confinement device, wherein the designated heavy metal interacts with the plasma in the magnetic confinement device to generate an extreme ultraviolet light;
- and
- controlling an optical device to collect the extreme ultraviolet light.
An extreme ultraviolet light source assembly, comprising:
- a magnetic confinement device, configured to generate a plasma;
- a heavy metal injection device, connected to the magnetic confinement device and configured to inject, if the plasma meets a preset injection condition, a designated heavy metal into the magnetic confinement device, wherein the designated heavy metal interacts with the plasma in the magnetic confinement device to generate an extreme ultraviolet light;
- and
- an optical device, configured to collect the extreme ultraviolet light.
Dependencies are inferred from the claim text.