Piezoelectric device

A piezoelectric device, comprising:

• a support substrate;
• an intermediate layer on the support substrate;
• a piezoelectric layer on the intermediate layer;
• a functional element on the piezoelectric layer;
• an insulation layer on the support substrate and in contact with a side surface of a multilayer body including the intermediate layer and the piezoelectric layer;
• and
• a wiring electrode extending from a top of the insulation layer to a top of the piezoelectric layer and connected to the functional element;
• wherein
• the insulation layer includes:
• a first region thinner than a thickness of the multilayer body;
• and
• a second region connecting the first region and the multilayer body and including a portion slanted from the first region toward an upper surface of the piezoelectric layer, and the second region of the insulation layer does not extend to the top of the piezoelectric layer;
• and
• a height of the top of the insulation layer in the second region is the same or substantially the same as a height of the top of the piezoelectric layer.