Acoustic wave device with dielectric layer for reduced transverse leakage
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara
Life of this patent
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Abstract
An acoustic wave device is disclosed. The acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode over the piezoelectric layer, a temperature compensation layer over the interdigital transducer electrode, and a dielectric layer positioned partially between the piezoelectric layer and the interdigital transducer electrode. The dielectric layer is positioned in an area under a first portion of the interdigital transducer electrode. An area under a second portion different from the first portion is free from the dielectric layer.
Claims20
An acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including an active region that has a center region and an edge region, a bus bar, and a gap region between the active region and the bus bar, at least a portion of the center region is in direct physical contact with the piezoelectric layer;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a dielectric layer positioned partially between the piezoelectric layer and the interdigital transducer electrode, the acoustic wave device configured to generate an acoustic wave with a wavelength of L, and the dielectric layer has a thickness in a range from 0.005L to 0.02L.
A surface acoustic wave device comprising:
- a lithium niobate layer having a cut angle in a range of −20° YX to 25° YX;
- an interdigital transducer electrode over the lithium niobate layer, the interdigital transducer electrode including an active region that has a center region and an edge region, a bus bar, and a gap region between the active region and the bus bar, at least a portion of the center region is in direct physical contact with the lithium niobate layer;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a dielectric layer selectively positioned under a location at or near an interface between the edge region and the gap region, the surface acoustic wave device configured to generate a surface acoustic wave with a wavelength L, and the dielectric layer has a thickness in a range from 0.005L to 0.02L.
Dependencies are inferred from the claim text.