Laser sensor and method of manufacturing a laser sensor

A method of manufacturing a SMI laser sensor, the method comprising:

• providing a vertical cavity surface emitting laser, VCSEL, configured to emit laser radiation, wherein providing the VCSEL comprises:
• providing a first distributed Bragg reflector, DBR;
• arranging a cavity region on a front side of the first DBR, the cavity region including an active light generation region;
• and
• arranging a second DBR on a front side of the cavity region;
• and
• providing an evaluation unit configured to monitor the laser radiation of the VCSEL;
• wherein providing at least one of the first and second DBR comprises forming a first contrast region and a second contrast region,
• wherein the first contrast region is formed from a plurality of layers of alternating materials having a first refractive index contrast Δn1/n regarding an emission wavelength of the VCSEL and the second contrast region is formed from a plurality of layers of alternating materials having a second refractive index contrast Δn2/n regarding an emission wavelength of the VCSEL,
• wherein the refractive index contrast corresponds to a difference of refractive indices of the alternating material layers divided by their mean value, and
• wherein the second refractive index contrast Δn2/n is larger than the first refractive index contrast Δn1/n.