US 12,640,454 B2 · Waveguide structure

Abstract

A coplanar waveguide (CPW) structure on a micro-electromechanical system (MEMS) device may comprise a glass device substrate that hosts a MEMS component on a first surface of the glass device substrate. The glass device substrate may have an associated set of metal layers that are used for fabrication of the MEMS component. The CPW structure may further comprise a glass cap having a top metal layer and a bottom metal layer. The CPW structure may further comprise a CPW signal path on the first surface of the glass device substrate, and a CPW ground plane on the first surface of the glass device substrate along a side of the CPW signal path. The CPW ground plane may comprise the bottom metal layer of the glass cap and at least one metal layer of the set of metal layers that are used for fabrication of the at least one MEMS component.

Claims19

Dependent claims

A coplanar waveguide (CPW) structure of a micro-electromechanical system (MEMS) device, comprising:

a device substrate that hosts at least one MEMS component on a first surface of the device substrate, the device substrate having an associated set of metal layers that are used for fabrication of the at least one MEMS component;
a cap having a top metal layer and a bottom metal layer, and having a cavity into which the at least one MEMS component is hermetically sealed by the cap bonded to the first surface of the device substrate;
a CPW signal path disposed on the first surface of the device substrate;
a CPW ground plane disposed on the first surface of the device substrate along a side of the CPW signal path, the CPW ground plane comprising (i) the bottom metal layer of the cap and (ii) at least one metal layer of the set of metal layers that are used for fabrication of the at least one MEMS component.

1 more element

Dependencies are inferred from the claim text.

Waveguide structure

Life of this patent

Waveguide structure

Life of this patent

Abstract

Claims19